A description of a wide beam saddle field ion source used for nuclear target applications
- Argonne National Lab., IL (United States). Physics Div.
A description is given of a new, wide beam saddle field sputter source used for the preparation of targets applied in nuclear physics experiments. The ion source characteristics are presented and compared with published results obtained with other sources. Deposition rates acquired utilizing this source are given for a variety of target materials encountered in nuclear target production. New applications involving target thinning and ion milling are discussed.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 505377
- Report Number(s):
- ANL/PHY/PP-88950; ON: DE97007878; TRN: 97:013393
- Resource Relation:
- Other Information: PBD: [1997]
- Country of Publication:
- United States
- Language:
- English
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