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Title: Comparison of Techniques for Bonding VCSELs Directly to Ics

Journal Article · · Journal of European Optical Society
OSTI ID:5011

This paper reports the successful bonding of 8 x 8 and 4 x 4 VCSEL arrays to Si CMOS and GaAs MESFET integrated circuits and to GaAs substrates. Three different bonding techniques are demonstrated and their electrical, optical and mechanical characteristics are compared. All three techniques remove the substrate from the VCSEL wafer, leaving individual VCSELs bonded directly to locations within the integrated circuit.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
5011
Report Number(s):
SAND99-0711J; TRN: AH200115%%7
Journal Information:
Journal of European Optical Society, Other Information: Submitted to Journal of European Optical Society; PBD: 26 Mar 1999
Country of Publication:
United States
Language:
English

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