Parameter optimization of a microfabricated surface acoustic wave sensor for inert gas detection
- and others
This work is related to designing, fabricating, and testing a surface acoustic wave sensor to be used for detecting metastable inert gases, particularly helium. The assembly consists of two microsensor configurations: (a) a reference device with no deposition at the delay line and (b) a sensing device with an Au-activated TiO{sub 2} e-beam-deposited thin film on the delay line. The interdigitated transducers and delay lines are fabricated by photolithography techniques on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the acoustic waves. Variation in electrical conductivity of the Au-activated TiO{sub 2} film due to exposure to metastable He is translated as a frequency change in the assembly. Various characteristics of the surface acoustic microsensor have been studied to better understand and optimize the variation of acoustic wave velocity and the operating frequency of the microdevice. Methods for the TiO{sub 2} thin-film deposition are discussed.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Assistant Secretary for Energy Efficiency and Renewable Energy, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 477770
- Report Number(s):
- ANL/ET/CP-91737; CONF-961202-105; ON: DE97004702; TRN: 97:010986
- Resource Relation:
- Conference: 1996 Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 2-6 Dec 1996; Other Information: PBD: 1996
- Country of Publication:
- United States
- Language:
- English
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