Materials and corrosion characterization using the confocal resonator
- and others
Improved characterization and process control is important to many Sandia and DOE programs related to manufacturing. Many processes/structures are currently under-characterized including thin film growth, corrosion and semiconductor structures, such as implant profiles. A sensitive tool is required that is able to provide lateral and vertical imaging of the electromagnetic properties of a sample. The confocal resonator is able to characterize the surface and near-surface impedance of materials. This device may be applied to a broad range of applications including in situ evaluation of thin film processes, physical defect detection/characterization, the characterization of semiconductor devices and corrosion studies. In all of these cases, the technology should work as a real-time process diagnostic or as a feedback mechanism regarding the quality of a manufacturing process. This report summarizes the development and exploration of several diagnostic applications.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 477763
- Report Number(s):
- SAND-97-0259; ON: DE97006210; TRN: 97:003488
- Resource Relation:
- Other Information: PBD: May 1997
- Country of Publication:
- United States
- Language:
- English
Similar Records
Engineering Titanium for Improved Biological Response
Self-consistent modeling of plasma density control using self-excited electron resonance spectroscopy