Micromachined systems-on-a-chip: Technology and applications
- Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.
- Univ. of California, Berkeley, CA (United States). Berkeley Sensor and Actuator Center
Sacrificial polysilicon surface micromachining is emerging as a technology that enables the mass production of complex microelectromechanical systems by themselves or integrated with microelectronic systems. Early versions of these micromachined systems-on-a-chip have already found application in the commercial world as acceleration sensors for airbag deployment (for example, ADI`s ADXL50). Two technologies described here, enable systems with increasing degrees of complexity to be fabricated. The first is a three-level polysilicon micromachining process which includes a fourth polysilicon electrical interconnect level, while the other is a single-level (+ second electrical interconnect level) polysilicon surface micromachining process integrated with 1.25 micron CMOS. Samples of systems-on-a-chip built in these processes such as combination locks, pop-up mirrors, and multi-axis accelerometers are also given.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 468576
- Report Number(s):
- SAND-97-0708C; CONF-970593-1; ON: DE97004033; TRN: AHC29710%%71
- Resource Relation:
- Conference: Sensors Expo, Boston, MA (United States), 14 May 1997; Other Information: PBD: [1997]
- Country of Publication:
- United States
- Language:
- English
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