Fabrication issues of oxide-confined VCSELs

Conference · Tue Apr 01 00:00:00 EST 1997

OSTI ID:468451

Geib, K M; Choquette, K D; Hou, H Q; Hammons, B E

To insert high-performance oxide-confined vertical-cavity surface- emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, sample temperature, carrier gas flow, and bubbler water temperature. Knowledge of these parameters has enable the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for Al{sub x}Ga{sub 1-x}As layers of x=1.00, 0.98, and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively. 7 figs, 1 tab, 14 refs.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 468451
• Report Number(s): SAND-97-0909C; CONF-970231-28; ON: DE97004649
• Resource Relation: Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: [1997]
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
ALUMINIUM ARSENIDES
GALLIUM ARSENIDES
LASERS
SEMICONDUCTOR LASERS
FABRICATION