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Title: Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort

Abstract

During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the development of new laser-plasma targets for projection x-ray or EUV (extreme ultraviolet) lithography. Our experimental and theoretical analyses incorporated target design as an integral part of the lithographic optical system. Targets studied included thick solid targets, thin-foil metal-coated targets, and cryogenic targets. Our complete measurement suite consisted of x-ray conversion efficiency measurements, source size imaging, source x-ray angular distribution measurements, debris collection, and source EUV spectrum. Target evaluation also included the variation of laser characteristics, such as, laser intensity, spot size, wavelength, pulselength, and pulseshape. Over the course of these experiments we examined targets using KrF (248nm), XeCl (308nm), and CO{sub 2} (10.6 {mu}m) lasers. While debris issues now dominate research in this area, final details were concluded on our understanding of material spectra and radiation transport of 13 run light in laser-plasmas. Additionally, conclusive results were obtained with 308 rim light, showing the pulselength threshold below which plumes no longer limited the transmission of (and thus the conversion efficiency to) 13 nm radiation.

Authors:
;  [1];  [2]
  1. Sandia National Labs., Albuquerque, NM (United States)
  2. Sandia National Labs., Livermore, CA (United States); and others
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
459880
Report Number(s):
SAND-97-0544
ON: DE97004161; TRN: 97:002389
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: Mar 1997
Country of Publication:
United States
Language:
English
Subject:
07 ISOTOPE AND RADIATION SOURCE TECHNOLOGY; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; LASER TARGETS; DESIGN; LASER-PRODUCED PLASMA; X-RAY SOURCES; ULTRAVIOLET SPECTRA; OPTICAL SYSTEMS; GAS LASERS; EXTREME ULTRAVIOLET RADIATION; INTEGRATED CIRCUITS

Citation Formats

Rockett, P D, Hunter, J A, and Kubiak, G D. Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort. United States: N. p., 1997. Web. doi:10.2172/459880.
Rockett, P D, Hunter, J A, & Kubiak, G D. Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort. United States. https://doi.org/10.2172/459880
Rockett, P D, Hunter, J A, and Kubiak, G D. 1997. "Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort". United States. https://doi.org/10.2172/459880. https://www.osti.gov/servlets/purl/459880.
@article{osti_459880,
title = {Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort},
author = {Rockett, P D and Hunter, J A and Kubiak, G D},
abstractNote = {During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the development of new laser-plasma targets for projection x-ray or EUV (extreme ultraviolet) lithography. Our experimental and theoretical analyses incorporated target design as an integral part of the lithographic optical system. Targets studied included thick solid targets, thin-foil metal-coated targets, and cryogenic targets. Our complete measurement suite consisted of x-ray conversion efficiency measurements, source size imaging, source x-ray angular distribution measurements, debris collection, and source EUV spectrum. Target evaluation also included the variation of laser characteristics, such as, laser intensity, spot size, wavelength, pulselength, and pulseshape. Over the course of these experiments we examined targets using KrF (248nm), XeCl (308nm), and CO{sub 2} (10.6 {mu}m) lasers. While debris issues now dominate research in this area, final details were concluded on our understanding of material spectra and radiation transport of 13 run light in laser-plasmas. Additionally, conclusive results were obtained with 308 rim light, showing the pulselength threshold below which plumes no longer limited the transmission of (and thus the conversion efficiency to) 13 nm radiation.},
doi = {10.2172/459880},
url = {https://www.osti.gov/biblio/459880}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Mar 01 00:00:00 EST 1997},
month = {Sat Mar 01 00:00:00 EST 1997}
}