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Title: Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report

Abstract

A pulsed rf plasma technique is capable of generating ceramic particles of 10 manometer dimension. Experiments using silane/ammonia and trimethylchlorosilane/hydrogen gas mixtures show that both silicon nitride and silicon carbide powders can be synthesized with control of the average particle diameter from 7 to 200 nm. Large size dispersion and much agglomeration appear characteristic of the method, in contrast to results reported by another research group. The as produced powders have a high hydrogen content and are air and moisture sensitive. Post-plasma treatment in a controlled atmosphere at elevated temperature (800{degrees}C) eliminates the hydrogen and stabilizes the powder with respect to oxidation or hydrolysis.

Authors:
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE Assistant Secretary for Fossil Energy, Washington, DC (United States)
OSTI Identifier:
453776
Report Number(s):
SAND-97-0039
ON: DE97004149; TRN: 97:002156
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: Feb 1997
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; SILICON CARBIDES; SYNTHESIS; INFRARED SPECTRA; SILICON NITRIDES; MIXTURES; PLASMA; POWDERS; SILANES; HYDROGEN; AGGLOMERATION; PARTICLE SIZE

Citation Formats

Buss, R J. Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report. United States: N. p., 1997. Web. doi:10.2172/453776.
Buss, R J. Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report. United States. https://doi.org/10.2172/453776
Buss, R J. 1997. "Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report". United States. https://doi.org/10.2172/453776. https://www.osti.gov/servlets/purl/453776.
@article{osti_453776,
title = {Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report},
author = {Buss, R J},
abstractNote = {A pulsed rf plasma technique is capable of generating ceramic particles of 10 manometer dimension. Experiments using silane/ammonia and trimethylchlorosilane/hydrogen gas mixtures show that both silicon nitride and silicon carbide powders can be synthesized with control of the average particle diameter from 7 to 200 nm. Large size dispersion and much agglomeration appear characteristic of the method, in contrast to results reported by another research group. The as produced powders have a high hydrogen content and are air and moisture sensitive. Post-plasma treatment in a controlled atmosphere at elevated temperature (800{degrees}C) eliminates the hydrogen and stabilizes the powder with respect to oxidation or hydrolysis.},
doi = {10.2172/453776},
url = {https://www.osti.gov/biblio/453776}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Feb 01 00:00:00 EST 1997},
month = {Sat Feb 01 00:00:00 EST 1997}
}