A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
Conference
·
OSTI ID:4264
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 4264
- Report Number(s):
- SAND99-0573C; TRN: AH200113%%134
- Resource Relation:
- Conference: Modeling and Simulation of Microsystems, MSM 99, San Juan (PR), 04/19/1999--04/21/1999; Other Information: PBD: 9 Mar 1999
- Country of Publication:
- United States
- Language:
- English
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