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Title: Hybrid gas-metal co-implantation with a modified vacuum arc ion source

Abstract

Energetic beams of mixed metal and gaseous ion species can be generated with a vacuum arc ion source by adding gas to the arc discharge region. This could be an important tool for ion implantation research by providing a method for forming buried layers of mixed composition such as e.g. metal oxides and nitrides. In work to date, we have formed a number of mixed metal-gas ion beams including Ti+N, Pt+N, Al+O, and Zr+O. The particle current fractions of the metal-gas ion components in the beam ranged from 100% metallic to about 80% gaseous, depending on operational parameters. We have used this new variant of the vacuum arc ion source to carry out some exploratory studies of the effect of Al+O and Zr+O co-implantation on tribology of stainless steel. Here we describe the ion source modifications, species and charge state of the hybrid beams produced, and results of preliminary studies of surface modification of stainless steel by co-implantation of mixed Al/O or Zr/O ion beams. 5 figs, 21 refs.

Authors:
;  [1];  [2];  [3]; ; ; ; ; ;  [4]
  1. AN SSSR, Tomsk (Russian Federation). Inst. Sil`notochnoj Ehlektroniki
  2. Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
  3. Dokuz Eylul Univ., Izmir (Turkey)
  4. Lawrence Berkeley National Lab., CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States); Electric Power Research Inst., Palo Alto, CA (United States)
OSTI Identifier:
403975
Report Number(s):
LBL-38514; CONF-960994-13
ON: DE97000920; CNN: DOD contract ARO-110-93;EPRI award number 8042-03
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Conference
Resource Relation:
Conference: IBMM `96: 10. international conference on ion beam modification of materials, Albuquerque, NM (United States), 1-6 Sep 1996; Other Information: PBD: Aug 1996
Country of Publication:
United States
Language:
English
Subject:
07 ISOTOPE AND RADIATION SOURCE TECHNOLOGY; 36 MATERIALS SCIENCE; ION IMPLANTATION; STAINLESS STEELS; SURFACE TREATMENTS; ION SOURCES; ION BEAMS; HYBRID SYSTEMS; ZIRCONIUM IONS; ALUMINIUM IONS; OXYGEN IONS; WEAR; FRICTION

Citation Formats

Oks, E M, Yushkov, G Y, Evans, P J, Oztarhan, A, Brown, I G, Dickinson, M R, Liu, F, MacGill, R A, Monteiro, O R, and Wang, Z. Hybrid gas-metal co-implantation with a modified vacuum arc ion source. United States: N. p., 1996. Web.
Oks, E M, Yushkov, G Y, Evans, P J, Oztarhan, A, Brown, I G, Dickinson, M R, Liu, F, MacGill, R A, Monteiro, O R, & Wang, Z. Hybrid gas-metal co-implantation with a modified vacuum arc ion source. United States.
Oks, E M, Yushkov, G Y, Evans, P J, Oztarhan, A, Brown, I G, Dickinson, M R, Liu, F, MacGill, R A, Monteiro, O R, and Wang, Z. 1996. "Hybrid gas-metal co-implantation with a modified vacuum arc ion source". United States. https://www.osti.gov/servlets/purl/403975.
@article{osti_403975,
title = {Hybrid gas-metal co-implantation with a modified vacuum arc ion source},
author = {Oks, E M and Yushkov, G Y and Evans, P J and Oztarhan, A and Brown, I G and Dickinson, M R and Liu, F and MacGill, R A and Monteiro, O R and Wang, Z},
abstractNote = {Energetic beams of mixed metal and gaseous ion species can be generated with a vacuum arc ion source by adding gas to the arc discharge region. This could be an important tool for ion implantation research by providing a method for forming buried layers of mixed composition such as e.g. metal oxides and nitrides. In work to date, we have formed a number of mixed metal-gas ion beams including Ti+N, Pt+N, Al+O, and Zr+O. The particle current fractions of the metal-gas ion components in the beam ranged from 100% metallic to about 80% gaseous, depending on operational parameters. We have used this new variant of the vacuum arc ion source to carry out some exploratory studies of the effect of Al+O and Zr+O co-implantation on tribology of stainless steel. Here we describe the ion source modifications, species and charge state of the hybrid beams produced, and results of preliminary studies of surface modification of stainless steel by co-implantation of mixed Al/O or Zr/O ion beams. 5 figs, 21 refs.},
doi = {},
url = {https://www.osti.gov/biblio/403975}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Aug 01 00:00:00 EDT 1996},
month = {Thu Aug 01 00:00:00 EDT 1996}
}

Conference:
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