Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

Conference · Fri Nov 01 00:00:00 EST 1996

OSTI ID:399963

Smith, J H

An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 399963
• Report Number(s): SAND-96-2200C; CONF-9610190-1; ON: DE96014503
• Resource Relation: Conference: Sensors Expo Philadelphia, Philadelphia, PA (United States), 22-24 Oct 1996; Other Information: PBD: [1996]
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
36 MATERIALS SCIENCE
MICROELECTRONIC CIRCUITS
RESEARCH PROGRAMS
SANDIA LABORATORIES
ACTUATORS
POLISHING
MACHINING
SILICON
MEASURING INSTRUMENTS
GEARS