Plasma distribution of cathodic ARC deposition system
Abstract
The plasma distribution using a cathodic arc plasma source with and without magnetic macroparticle filter has been determined by depositing on a transparent plastic substrate and measuring the film absorption. It was found that the width of the distribution depends on the arc current, and it also depends on the cathode material which leads to a spatial separation of the elements when an alloy cathode is used. By applying a magnetic multicusp field near the exit of the magnetic filter, it was possible to modify the plasma distribution and obtain a flat plasma profile with a constant and homogeneous elemental distribution.
- Authors:
-
- Lawrence Berkeley National Lab., CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 387461
- Report Number(s):
- LBNL-38845; CONF-9509356-
Journal ID: ISSN 0021--8979; ON: DE96014963; TRN: 96:027269
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Conference
- Resource Relation:
- Journal Volume: 79; Journal Issue: 9; Conference: Workshop on vacuum arc ion sources, Berkeley, CA (United States), 18-20 Sep 1995; Other Information: PBD: Aug 1996; Related Information: Is Part Of Proceedings of the workshop on vacuum arc ion sources; Brown, I. [ed.]; PB: 142 p.
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 66 PHYSICS; ION SOURCES; BEAM PROFILES; PLASMA; SPATIAL DISTRIBUTION; ELECTRIC ARCS; CATHODE SPUTTERING
Citation Formats
Anders, S, Raoux, S, Krishnan, K, MacGill, R A, and Brown, I G. Plasma distribution of cathodic ARC deposition system. United States: N. p., 1996.
Web. doi:10.1063/1.361523.
Anders, S, Raoux, S, Krishnan, K, MacGill, R A, & Brown, I G. Plasma distribution of cathodic ARC deposition system. United States. https://doi.org/10.1063/1.361523
Anders, S, Raoux, S, Krishnan, K, MacGill, R A, and Brown, I G. 1996.
"Plasma distribution of cathodic ARC deposition system". United States. https://doi.org/10.1063/1.361523. https://www.osti.gov/servlets/purl/387461.
@article{osti_387461,
title = {Plasma distribution of cathodic ARC deposition system},
author = {Anders, S and Raoux, S and Krishnan, K and MacGill, R A and Brown, I G},
abstractNote = {The plasma distribution using a cathodic arc plasma source with and without magnetic macroparticle filter has been determined by depositing on a transparent plastic substrate and measuring the film absorption. It was found that the width of the distribution depends on the arc current, and it also depends on the cathode material which leads to a spatial separation of the elements when an alloy cathode is used. By applying a magnetic multicusp field near the exit of the magnetic filter, it was possible to modify the plasma distribution and obtain a flat plasma profile with a constant and homogeneous elemental distribution.},
doi = {10.1063/1.361523},
url = {https://www.osti.gov/biblio/387461},
journal = {},
issn = {0021--8979},
number = 9,
volume = 79,
place = {United States},
year = {Thu Aug 01 00:00:00 EDT 1996},
month = {Thu Aug 01 00:00:00 EDT 1996}
}
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