Performance tradeoffs for a surface micromachined microengine
An electromechanical model of Sandia`s microengine is developed and applied to quantify critical performance tradeoffs. This is done by determining how forces impact the mechanical response of the engine to different electrical drive signals. To validate the theoretical results, model-based drive signals are used to operate actual engines, where controlled operation is achieved for the following cases: (1) spring forces are dominant, (2) frictional forces are dominant, (3) linear inertial forces are dominant, (4) viscous damping forces are dominant, and (5) inertial load forces are dominant. Significant improvements in engine performance are experimentally demonstrated in the following areas: positional control, start/stop endurance, constant speed endurance, friction load reduction, and rapid actuation of inertial loads.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 378812
- Report Number(s):
- SAND-96-1958C; CONF-961086-5; ON: DE96014844; TRN: AHC29620%%24
- Resource Relation:
- Conference: SPIE conference on micromachining and microfabrication, Austin, TX (United States), 14-15 Oct 1996; Other Information: PBD: [1996]
- Country of Publication:
- United States
- Language:
- English
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