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Title: Probe and object function reconstruction in incoherent stem imaging

Technical Report ·
DOI:https://doi.org/10.2172/367250· OSTI ID:367250

Using the phase-object approximation it is shown how an annular dark- field (ADF) detector in a scanning transmission electron microscope (STEM) leads to an image which can be described by an incoherent model. The point spread function is found to be simply the illuminating probe intensity. An important consequence of this is that there is no phase problem in the imaging process, which allows various image processing methods to be applied directly to the image intensity data. Using an image of a GaAs<110>, the probe intensity profile is reconstructed, confirming the existence of a 1.3 {Angstrom} probe in a 300kV STEM. It is shown that simply deconvolving this reconstructed probe from the image data does not improve its interpretability because the dominant effects of the imaging process arise simply from the restricted resolution of the microscope. However, use of the reconstructed probe in a maximum entropy reconstruction is demonstrated, which allows information beyond the resolution limit to be restored and does allow improved image interpretation.

Research Organization:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC05-96OR22464
OSTI ID:
367250
Report Number(s):
CONF-9605207-1; ON: TI96013793
Resource Relation:
Conference: 15. Pfefferkorn conference on electron image and signal processing, Silver Bay, NY (United States), 18-22 May 1996; Other Information: PBD: [1996]
Country of Publication:
United States
Language:
English