Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering

Conference · Tue Dec 22 00:00:00 EST 1998

OSTI ID:2819

Adams, D P; Benavides, G L; Vasile, M J

This work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25 {micro}m diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26-28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 2819
• Report Number(s): SAND98-2843C; TRN: AH200112%%178
• Resource Relation: Conference: Materials Research Society Fall Meeting, Boston, MA (US), 11/30/1998--12/04/1998; Other Information: PBD: 22 Dec 1998
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM ALLOYS
BRASS
ION BEAMS
MACHINING
POLYMERS
SPUTTERING
CUTTING TOOLS