Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae
A previously-developed approximation to the first integral of the Poisson equation enables one to obtain solutions for the voltage- current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory reproduced the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. In this paper the sheath model is connected to the plasma bulk description, and a prescription is given for the ion relaxation time constant, which determines the time-dependent ion impact energy on the electrode surface. It appears that this connected model should be applicable to those high density, low pressure plasmas in which the Debye length is a small fraction of the ion mean free path, which itself is a small fraction of the plasma dimension.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 274143
- Report Number(s):
- SAND-96-1948; ON: DE96014005
- Resource Relation:
- Other Information: PBD: Aug 1996
- Country of Publication:
- United States
- Language:
- English
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