Micro-electro-mechanical systems projects at Lawrence Livermore National Laboratory
Conference
·
OSTI ID:192503
The Lawrence Livermore National Laboratory (LLNL) MicroTechnology Center has developed a wide variety of special capabilities used to design, build, and test MEMS (Micro-Electro-Mechanical Systems). Our customers are both the LLNL Programs and a variety of external customers. Typical applications include: custom microstructures for scientific experiments; physical sensors; photonics; miniature tools for catheter-based surgery; and microinstruments for chemical analysis for biomedicine, environments and treaty verification. The majority of our prototype MEMS devices are fabricated with bulk silicon micromachining, but we also utilize surface micromachining capabilities.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 192503
- Report Number(s):
- UCRL-JC-121666; CONF-9511143-1; ON: DE96005388; TRN: 96:001614
- Resource Relation:
- Conference: IEEE WESCON conference, San Francisco, CA (United States), 8 Nov 1995; Other Information: PBD: 4 Aug 1995
- Country of Publication:
- United States
- Language:
- English
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