Research in Hydrogen Passivation of Defects and Impurities in Silicon: Final Report, 2 May 2000-2 July 2003

Technical Report · Wed Dec 01 00:00:00 EST 2004

DOI:https://doi.org/10.2172/15011711· OSTI ID:15011711

Ashok, S

This subcontract report describes hydrogenating Si samples by different methods such as low-energy implantation, electron cyclotron resonance (ECR) plasma, and thermal diffusion. The samples were provided through NREL. The experimental work, carried out at Penn State, involved the study of hydrogen interaction with defects, trapping, migration, and formation of complexes. The principal vehicle for the latter study was ion implantation, and the intent to understand mechanisms of defect passivation and activation by hydrogen. NREL implemented a study of hydrogen passivation of impurities and defects in silicon solar cells. The work included theoretical and experimental components performed at different universities. The theoretical studies consisted of the calculation of the structure and parameters related to hydrogen diffusion and interactions of hydrogen with transition-metal impurities in silicon. Experimental studies involved measurements of hydrogen and hydrogen-impurity complexes, and diffusion properties of various species of hydrogen in Si. The experimental work at Penn State included introduction of hydrogen in a variety of PV Si by ECR plasma, low-energy ion implantation, and thermal diffusion. The specific tasks were the evaluation of hydrogen interaction with defects engineered by ion implantation; defect passivation, activation, and migration in hydrogenated Si under thermal anneal; and electrical activity of hydrogen-impurity complexes. Electrical characterization entailed I-V and C-V measurements, spreading resistance, and deep-level transient spectroscopy (DLTS).

• Research Organization: National Renewable Energy Lab. (NREL), Golden, CO (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC36-99-GO10337
• OSTI ID: 15011711
• Report Number(s): NREL/SR-520-37181; ACQ-9-29639-04; TRN: US0501391
• Resource Relation: Other Information: PBD: 1 Dec 2004; Related Information: Work performed by Pennsylvania State University, University Park, Pennsylvania
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
08 HYDROGEN
14 SOLAR ENERGY
43 PARTICLE ACCELERATORS
DEFECTS
DIFFUSION
ELECTRON CYCLOTRON-RESONANCE
EVALUATION
HYDROGEN
IMPURITIES
ION IMPLANTATION
PASSIVATION
PLASMA
SILICON
SILICON SOLAR CELLS
SPECTROSCOPY
THERMAL DIFFUSION
TRANSIENTS
TRAPPING
PV
THIN FILM
MODULE
ELECTRON CYCLOTRON RESONANCE (ECR) PLASMA
DEEP-LEVEL TRANSIENT SPECTROSCOPY (DLTS)
CRYSTALLINE
SOLAR CELLS
SOLAR ENERGY - PHOTOVOLTAICS