Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.
Abstract
A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.
- Authors:
-
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Argonne National Lab. (ANL), Argonne, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
- Inonu Univ., Malatya (Turkey)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1357490
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Journal Article: Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 104; Journal Issue: 9; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, and Proslier, Thomas. Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.. United States: N. p., 2014.
Web. doi:10.1063/1.4867880.
Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, & Proslier, Thomas. Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.. United States. https://doi.org/10.1063/1.4867880
Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, and Proslier, Thomas. 2014.
"Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.". United States. https://doi.org/10.1063/1.4867880. https://www.osti.gov/servlets/purl/1357490.
@article{osti_1357490,
title = {Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.},
author = {Groll, Nickolas and Klug, Jeffrey A. and Cao, Chaoyue and Altin, Serdar and Claus, Helmut and Becker, Nicholas G. and Zasadzinski, John and Pellin, Mike and Proslier, Thomas},
abstractNote = {A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.},
doi = {10.1063/1.4867880},
url = {https://www.osti.gov/biblio/1357490},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 9,
volume = 104,
place = {United States},
year = {Mon Mar 03 00:00:00 EST 2014},
month = {Mon Mar 03 00:00:00 EST 2014}
}
Web of Science
Works referenced in this record:
Superconductive tunneling into NbN deposited near room temperature
journal, October 1982
- van Dover, R. B.; Bacon, D. D.; Sinclair, W. Robert
- Applied Physics Letters, Vol. 41, Issue 8
Properties of NbN thin films deposited on ambient temperature substrates
journal, November 1983
- Bacon, D. D.; English, A. T.; Nakahara, S.
- Journal of Applied Physics, Vol. 54, Issue 11
High T c superconducting NbN films deposited at room temperature
journal, December 1985
- Thakoor, S.; Lamb, J. L.; Thakoor, A. P.
- Journal of Applied Physics, Vol. 58, Issue 12
Superconductivity of B1 -MoN films annealed under high pressure
journal, August 1985
- Ihara, H.; Hirabayashi, M.; Senzaki, K.
- Physical Review B, Vol. 32, Issue 3
Epitaxial Superconducting δ-MoN Films Grown by a Chemical Solution Method
journal, December 2011
- Zhang, Yingying; Haberkorn, Nestor; Ronning, Filip
- Journal of the American Chemical Society, Vol. 133, Issue 51
Synthesis and characterisation of hexagonal molybdenum nitrides
journal, August 2006
- Ganin, Alexey Yu.; Kienle, Lorenz; Vajenine, Grigori V.
- Journal of Solid State Chemistry, Vol. 179, Issue 8
Structural distortion and suppression of superconductivity in stoichiometric epitaxial thin films
journal, February 2006
- Inumaru, Kei; Baba, Kazuya; Yamanaka, Shoji
- Physical Review B, Vol. 73, Issue 5
Superconducting molybdenum nitride epitaxial thin films deposited on MgO and α-Al2O3 substrates by molecular beam epitaxy
journal, December 2006
- Inumaru, Kei; Baba, Kazuya; Yamanaka, Shoji
- Applied Surface Science, Vol. 253, Issue 5
Superconducting transition metal nitride films for THz SIS mixers
journal, March 2001
- Iosad, N. N.; Roddatis, V. V.; Polyakov, S. N.
- IEEE Transactions on Appiled Superconductivity, Vol. 11, Issue 1
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
journal, June 2005
- Puurunen, Riikka L.
- Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301
Atomic Layer Deposition and Superconducting Properties of NbSi Films
journal, April 2011
- Proslier, Thomas; Klug, Jeffrey A.; Elam, Jeffrey W.
- The Journal of Physical Chemistry C, Vol. 115, Issue 19
Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method
journal, December 1988
- Hiltunen, L.; Leskelä, M.; Mäkelä, M.
- Thin Solid Films, Vol. 166
Point contact tunnelling apparatus with temperature and magnetic field control
journal, September 1998
- Ozyuzer, L.; Zasadzinski, J. F.; Gray, K. E.
- Cryogenics, Vol. 38, Issue 9
Direct Measurement of Quasiparticle-Lifetime Broadening in a Strong-Coupled Superconductor
journal, November 1978
- Dynes, R. C.; Narayanamurti, V.; Garno, J. P.
- Physical Review Letters, Vol. 41, Issue 21
Improvement and protection of niobium surface superconductivity by atomic layer deposition and heat treatment
journal, November 2008
- Proslier, T.; Zasadzinski, J.; Moore, J.
- Applied Physics Letters, Vol. 93, Issue 19
Superconducting tunneling study of vanadium
journal, February 1982
- Zasadzinski, J.; Burnell, D. M.; Wolf, E. L.
- Physical Review B, Vol. 25, Issue 3
Low-Temperature Al2O3 Atomic Layer Deposition
journal, February 2004
- Groner, M. D.; Fabreguette, F. H.; Elam, J. W.
- Chemistry of Materials, Vol. 16, Issue 4, p. 639-645
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
journal, August 2002
- Elam, J. W.; Groner, M. D.; George, S. M.
- Review of Scientific Instruments, Vol. 73, Issue 8, p. 2981-2987
Critical current across grain boundaries in melt-textured rings
journal, September 2001
- Claus, H.; Welp, U.; Zheng, H.
- Physical Review B, Vol. 64, Issue 14
Works referencing / citing this record:
First complex oxide superconductor by atomic layer deposition
journal, January 2018
- Sønsteby, Henrik Hovde; Aarholt, Thomas; Prytz, Øystein
- Chemical Communications, Vol. 54, Issue 59