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Title: Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.

Abstract

A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.

Authors:
 [1];  [1];  [2];  [3];  [1];  [2];  [2];  [1];  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
  3. Inonu Univ., Malatya (Turkey)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1357490
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 104; Journal Issue: 9; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, and Proslier, Thomas. Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.. United States: N. p., 2014. Web. doi:10.1063/1.4867880.
Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, & Proslier, Thomas. Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.. United States. https://doi.org/10.1063/1.4867880
Groll, Nickolas, Klug, Jeffrey A., Cao, Chaoyue, Altin, Serdar, Claus, Helmut, Becker, Nicholas G., Zasadzinski, John, Pellin, Mike, and Proslier, Thomas. 2014. "Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.". United States. https://doi.org/10.1063/1.4867880. https://www.osti.gov/servlets/purl/1357490.
@article{osti_1357490,
title = {Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.},
author = {Groll, Nickolas and Klug, Jeffrey A. and Cao, Chaoyue and Altin, Serdar and Claus, Helmut and Becker, Nicholas G. and Zasadzinski, John and Pellin, Mike and Proslier, Thomas},
abstractNote = {A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.},
doi = {10.1063/1.4867880},
url = {https://www.osti.gov/biblio/1357490}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 9,
volume = 104,
place = {United States},
year = {Mon Mar 03 00:00:00 EST 2014},
month = {Mon Mar 03 00:00:00 EST 2014}
}

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Cited by: 10 works
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Works referenced in this record:

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Works referencing / citing this record:

First complex oxide superconductor by atomic layer deposition
journal, January 2018