Microstructured silicon radiation detector
Patent
·
OSTI ID:1346947
A radiation detector comprises a silicon body in which are defined vertical pores filled with a converter material and situated within silicon depletion regions. One or more charge-collection electrodes are arranged to collect current generated when secondary particles enter the silicon body through walls of the pores. The pores are disposed in low-density clusters, have a majority pore thickness of 5 .mu.m or less, and have a majority aspect ratio, defined as the ratio of pore depth to pore thickness, of at least 10.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation
- Patent Number(s):
- 9,595,628
- Application Number:
- 14/456,934
- OSTI ID:
- 1346947
- Resource Relation:
- Patent File Date: 2014 Aug 11
- Country of Publication:
- United States
- Language:
- English
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