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Title: New figuring model based on surface slope profile for grazing-incidence reflective optics

Journal Article · · Journal of Synchrotron Radiation (Online)
 [1];  [2];  [2];  [2];  [2];  [3];  [3];  [2]
  1. National Univ. of Defense Technology, Changsha, Hunan (China). College of Mechatronic Engineering and Automation; Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Hu'nan Key Lab. of Ultra-precision Machining Technology, Changsha, Hunan (China)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  3. National Univ. of Defense Technology, Changsha, Hunan (China). College of Mechatronic Engineering and Automation; Hu'nan Key Lab. of Ultra-precision Machining Technology, Changsha, Hunan (China)
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Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this article, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0012704
OSTI ID:
1340406
Report Number(s):
BNL-113213-2016-JA; JSYRES; TRN: US1701734
Journal Information:
Journal of Synchrotron Radiation (Online), Vol. 23, Issue 5; ISSN 1600-5775
Publisher:
International Union of CrystallographyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 12 works
Citation information provided by
Web of Science

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Related Subjects

36 MATERIALS SCIENCE
ion beam figuring
synchrotron optics
one-dimensional
surface slope