Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Gou, Huiyang; Hemley, Russell J.; Hemawan, Kadek W.

doi:10.1063/1.4934751

Title: Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Journal Article · Mon Nov 02 00:00:00 EST 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4934751· OSTI ID:1335449

^[1]; Hemley, Russell J. ^[1];

^[1]

Carnegie Inst. of Washington, Washington, D.C. (United States)

Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH₄/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C₂, Ar, N₂, CH, H_β and H_α were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T_2g phonon at 1333 cm^-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.

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Research Organization:: Carnegie Inst. of Washington, Washington, DC (United States); Energy Frontier Research Centers (EFRC) (United States). Energy Frontier Research in Extreme Environments (EFree)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0002006; SC0001057; W31P4Q1310005; NA-002006

OSTI ID:: 1335449

Alternate ID(s):: OSTI ID: 1224932

Journal Information:: Applied Physics Letters, Vol. 107, Issue 18; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 17 works

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Fast growth of nanodiamond in a microwave oven under atmospheric conditions Roy, Soumyendu; Bajpai, Reeti; Biro, Ronit Popovitz Journal of Materials Science, Vol. 55, Issue 2 https://doi.org/10.1007/s10853-019-03936-4	journal	August 2019
Morphology and mechanical behavior of diamond films fabricated by IH-MPCVD Tu, Rong; Xu, Tiantian; Li, Dengfeng RSC Advances, Vol. 8, Issue 29 https://doi.org/10.1039/c8ra01871e	journal	January 2018
Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen Yang, Li; Jiang, Caiyi; Guo, Shenghui Nanoscale Research Letters, Vol. 11, Issue 1 https://doi.org/10.1186/s11671-016-1628-x	journal	September 2016

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