Synthesis of Hexagonal Boron Nitride Mono layer: Control of Nucleation and Crystal Morphology

Stehle, Yijing Y.; Meyer, III, Harry M.; Unocic, Raymond R.; Kidder, Michelle; Polyzos, Georgios; Datskos, Panos G.; Jackson, Roderick K.; Vlassiouk, Ivan V.

doi:10.1021/acs.chemmater.5b03607

Title: Synthesis of Hexagonal Boron Nitride Mono layer: Control of Nucleation and Crystal Morphology

Journal Article · Tue Nov 10 00:00:00 EST 2015 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.5b03607· OSTI ID:1335331

Stehle, Yijing Y. ^[1]; Meyer, III, Harry M. ^[1]; Unocic, Raymond R. ^[1]; Kidder, Michelle ^[1]; Polyzos, Georgios ^[1]; Datskos, Panos G. ^[1]; Jackson, Roderick K. ^[1]; Vlassiouk, Ivan V. ^[1]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Mono layer hexagonal boron nitride (hBN) attracts significant attention due to the potential to be used as a complementary two-dimensional dielectric in fabrication of functional 2D heterostructures. Here we investigate the growth stages of the hBN single crystals and show that hBN crystals change their shape from triangular to truncated triangular and further to hexagonal depending on copper substrate distance from the precursor. We suggest that the observed hBN crystal shape variation is affected by the ratio of boron to nitrogen active species concentrations on the copper surface inside the CVD reactor. Strong temperature dependence reveals the activation energies for the hBN nucleation process of similar to 5 eV and crystal growth of similar to 3.5 eV. We also show that the resulting h-BN film morphology is strongly affected by the heating method of borazane precursor and the buffer gas. Elucidation of these details facilitated synthesis of high quality large area monolayer hexagonal boron nitride by atmospheric pressure chemical vapor deposition on copper using borazane as a precursor.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1335331

Journal Information:: Chemistry of Materials, Vol. 27, Issue 23; ISSN 0897-4756

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 165 works

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