The role of nanoscale seed layers on the enhanced performance of niobium doped TiO2 thin films on glass

Nikodemski, Stefan; Dameron, Arrelaine A.; Perkins, John D.; O’Hayre, Ryan P.; Ginley, David S.; Berry, Joseph J.

doi:10.1038/srep32830

Title: The role of nanoscale seed layers on the enhanced performance of niobium doped TiO₂ thin films on glass

Journal Article · Fri Sep 09 00:00:00 EDT 2016 · Scientific Reports

DOI:https://doi.org/10.1038/srep32830· OSTI ID:1326331

Nikodemski, Stefan ^[1]; Dameron, Arrelaine A. ^[2]; Perkins, John D. ^[2]; O’Hayre, Ryan P. ^[1]; Ginley, David S. ^[2]; Berry, Joseph J. ^[2]

Colorado School of Mines, Golden, CO (United States)
National Renewable Energy Lab. (NREL), Golden, CO (United States)

Transparent conducting oxide (TCO) coatings with decreased cost and greater process or performance versatility are needed for a variety of optoelectronic applications. Among potential new TCO candidates, doped titanium dioxide is receiving particular interest. In this study, niobium-doped titania bilayer structures consisting of a nanoscale seed layer (deposited by atomic layer deposition or RF magnetron sputtering) followed by a thick bulk-like layer were grown directly on glass in order to examine the effects of the seed layer processing on the subsequent crystallization and electrical properties of these heterostructures. Observations from Raman spectroscopy suggest that higher oxygen content in the seed layer suppresses the formation of detrimental titania polymorph phases, found in films produced by annealing directly after synthesis without any exposure to oxygen. Here, our results indicate that the generation of excellent Nb:TiO₂ conductors on glass (without breaking vacuum) only occurs within a narrow processing range and that the sequential deposition of oxygen-poor layers on oxygen-rich layers is a critical step towards achieving films with low resistivity.

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Research Organization:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office

Grant/Contract Number:: AC36-08GO28308

OSTI ID:: 1326331

Report Number(s):: NREL/JA-5K00-67169

Journal Information:: Scientific Reports, Vol. 6; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 10 works

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