U.S. Department of EnergyOffice of Scientific and Technical Information
Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond
Abstract
A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 10.sup.12 to about 10.sup.14 emitting sites per cm.sup.2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.
- Inventors:
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1295657
- Patent Number(s):
- 9,418,814
- Application Number:
- 14/594,949
- Assignee:
- UCHICAGO ARGONNE, LLC (Chicago, IL)
- DOE Contract Number:
- AC02-06CH11357; SC0009572
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Jan 12
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Sumant, Anirudha V., Baryshev, Sergey V., and Antipov, Sergey P. Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond. United States: N. p., 2016.
Web.
Sumant, Anirudha V., Baryshev, Sergey V., & Antipov, Sergey P. Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond. United States.
Sumant, Anirudha V., Baryshev, Sergey V., and Antipov, Sergey P. 2016.
"Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond". United States. https://www.osti.gov/servlets/purl/1295657.
@article{osti_1295657,
title = {Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond},
author = {Sumant, Anirudha V. and Baryshev, Sergey V. and Antipov, Sergey P.},
abstractNote = {A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 10.sup.12 to about 10.sup.14 emitting sites per cm.sup.2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.},
doi = {},
url = {https://www.osti.gov/biblio/1295657},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 16 00:00:00 EDT 2016},
month = {Tue Aug 16 00:00:00 EDT 2016}
}
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