Full elastic strain and stress tensor measurements from individual dislocation cells in copper through-Si vias

Levine, Lyle E.; Okoro, Chukwudi A.; Xu, Ruqing

doi:10.1107/S2052252515015031

Title: Full elastic strain and stress tensor measurements from individual dislocation cells in copper through-Si vias

Journal Article · Wed Sep 30 00:00:00 EDT 2015 · IUCrJ

DOI:https://doi.org/10.1107/S2052252515015031· OSTI ID:1248965

Levine, Lyle E. ^[1]; Okoro, Chukwudi A. ^[2]; Xu, Ruqing ^[3]

National Institute of Standards and Technology, Gaithersburg, MD (United States)
National Institute of Standard and Technology, Gaithersburg, MD (United States)
Argonne National Lab. (ANL), Argonne, IL (United States)

We report non-destructive measurements of the full elastic strain and stress tensors from individual dislocation cells distributed along the full extent of a 50 mm-long polycrystalline copper via in Si is reported. Determining all of the components of these tensors from sub-micrometre regions within deformed metals presents considerable challenges. The primary issues are ensuring that different diffraction peaks originate from the same sample volume and that accurate determination is made of the peak positions from plastically deformed samples. For these measurements, three widely separated reflections were examined from selected, individual grains along the via. The lattice spacings and peak positions were measured for multiple dislocation cell interiors within each grain and the cell-interior peaks were sorted out using the measured included angles. A comprehensive uncertainty analysis using a Monte Carlo uncertainty algorithm provided uncertainties for the elastic strain tensor and stress tensor components.

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1248965

Journal Information:: IUCrJ, Vol. 2, Issue 6; ISSN 2052-2525

Publisher:: International Union of CrystallographyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 15 works

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References (16)

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Unexpected δ-Phase Formation in Additive-Manufactured Ni-Based Superalloy Idell, Y.; Levine, L. E.; Allen, A. J. JOM, Vol. 68, Issue 3 https://doi.org/10.1007/s11837-015-1772-2	journal	January 2016
Evaluation of intragranular strain and average dislocation density in single grains of a polycrystal using K-map scanning Filippelli, Ernesto; Chahine, Gilbert; Borbély, András Journal of Applied Crystallography, Vol. 49, Issue 5 https://doi.org/10.1107/s1600576716013224	journal	September 2016
Stress, strain and Raman shifts Angel, Ross J.; Murri, Mara; Mihailova, Boriana Zeitschrift für Kristallographie - Crystalline Materials, Vol. 234, Issue 2 https://doi.org/10.1515/zkri-2018-2112	journal	February 2019
High Resolution Mapping of Orientation and Strain Gradients in Metals by Synchrotron 3D X-ray Laue Microdiffraction Zhang, Yubin; Barabash, Rozaliya Quantum Beam Science, Vol. 3, Issue 1 https://doi.org/10.3390/qubs3010006	journal	March 2019

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