Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique

Kelly, Priscilla; Liu, Mingzhao; Kuznetsova, Lyuba

doi:10.1364/AO.55.002993

Title: Designing optical metamaterial with hyperbolic dispersion based on Al:ZnO/ZnO nano-layered structure using Atomic Layer Deposition technique

Journal Article · Thu Apr 07 00:00:00 EDT 2016 · Applied Optics

DOI:https://doi.org/10.1364/AO.55.002993· OSTI ID:1247974

Kelly, Priscilla ^[1]; Liu, Mingzhao ^[2]; Kuznetsova, Lyuba ^[1]

San Diego State Univ., San Diego, CA (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States)

In this study, nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1:9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 μm wavelength.

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Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC00112704; CFN user proposal 33123

OSTI ID:: 1247974

Alternate ID(s):: OSTI ID: 1245507

Report Number(s):: BNL-112047-2016-JA; APOPAI; R&D Project: 16064/16064; KC0403020

Journal Information:: Applied Optics, Vol. 55, Issue 11; ISSN 0003-6935

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 19 works

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Cited By (5)

Three-level system for numerical modeling of ultraviolet and visible photoluminescence of aluminum-doped zinc oxide Campbell, Bethany; Zarate, Evan; Kelly, Priscilla Journal of the Optical Society of America B, Vol. 36, Issue 4 https://doi.org/10.1364/josab.36.001017	journal	January 2019
Engineering the structural, plasmonic, and optical properties of multilayered aluminum-doped zinc oxide metamaterial grown by pulsed laser deposition Kelly, Priscilla; Zhang, Wenrui; Liu, Mingzhao Applied Optics, Vol. 58, Issue 21 https://doi.org/10.1364/ao.58.005681	journal	January 2019
Pulse shaping in the presence of enormous second-order dispersion in Al:ZnO/ZnO epsilon-near-zero metamaterial Kelly, Priscilla; Kuznetsova, Lyuba Applied Physics B, Vol. 124, Issue 4 https://doi.org/10.1007/s00340-018-6929-6	journal	March 2018
Infrared metamaterial by RF magnetron sputtered ZnO/Al:ZnO multilayers Santiago, Kevin C.; Mundle, Rajeh; White, Curtis AIP Advances, Vol. 8, Issue 3 https://doi.org/10.1063/1.5024900	journal	March 2018
Adaptive pre-shaping for ultrashort pulse control during propagation in AZO/ZnO multilayered metamaterial at the epsilon-near-zero spectral point Kelly, Priscilla; Kuznetsova, Lyuba OSA Continuum, Vol. 3, Issue 2 https://doi.org/10.1364/osac.372319	journal	January 2020

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