SEM Resolution Improvement Using Semi-Blind Restoration with Hybrid L1-L2 Regularization

Title: SEM Resolution Improvement Using Semi-Blind Restoration with Hybrid L1-L2 Regularization

Conference · Thu Mar 17 00:00:00 EDT 2016

DOI:https://doi.org/10.1109/SSIAI.2016.7459168· OSTI ID:1242918

Lin, Youzuo ^[1]; Kandel, Yudhishthir ^[2]; Zotta, Matthew ^[2]; Lifshin, Eric ^[2]

Los Alamos National Laboratory
Colleges of Nanoscale Science and Engineering, State University of New York, Polytechnic Institute

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Research Organization:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

Resource Relation:: Conference: 2016 IEEE Southwest Symposium on Image Analysis and Interpretation ; 2016-03-06 - 2016-03-08 ; Santa Fe, New Mexico, United States

Improved Low Voltage SEM Image Resolution Through The Use of Restoration Techniques

Conference · Mon Aug 03 00:00:00 EDT 2015 · OSTI ID:1242918

Zotta, Matthew; Kandel, Yudhishthir; Lin, Youzuo; +2 more

Conference · Wed Aug 13 00:00:00 EDT 2014 · OSTI ID:1242918

Lifshin, Eric; Kandel, Yudhishthir; Moore, Richard; +3 more

Conference · Fri Nov 30 00:00:00 EST 2007 · OSTI ID:1242918

Wohlberg, Brendt E.

Mathematics