Literature Review of Spin On Glass
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Spin on glass (SOG) is a promising material that combines the planarization properties of a low-viscosity liquid with a dielectric constant lower than that of silicon dioxide. However, as this paper will show, this material comes with significant processing and material properties challenges that must be understood and overcome. Significant research has been accomplished through a variety of processing techniques that will be reviewed here.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC52-06NA25396
- OSTI ID:
- 1240802
- Report Number(s):
- LA-UR-16-21332
- Country of Publication:
- United States
- Language:
- English
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