Rapid Evaluation of Particle Properties using Inverse SEM Simulations

Technical Report · Fri Jan 01 00:00:00 EST 2016

DOI:https://doi.org/10.2172/1238023· OSTI ID:1238023

Bekar, Kursat B. ^[1]; Miller, Thomas Martin ^[1]; Patton, Bruce W. ^[1]; Weber, Charles F. ^[1]

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1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

This report is the final deliverable of a 3 year project whose purpose was to investigate the possibility of using simulations of X-ray spectra generated inside a scanning electron microscope (SEM) as a means to perform quantitative analysis of the sample imaged in the SEM via an inverse analysis methodology. Using the nine point Technology Readiness Levels (TRL) typically used by the US Department of Defense (DOD) and the National Aeronautics and Space Administration (NASA), this concept is now at a TRL of 3. In other words, this work has proven the feasibility of this concept and is ready to be further investigated to address some of the issues highlighted by this initial proof of concept.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 1238023
• Report Number(s): ORNL/TM-2015/779; NN2001000; NNPORES; TRN: US1600531
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
SCANNING ELECTRON MICROSCOPY
SIMULATION
X-RAY SPECTRA
EVALUATION
IMAGES
FEASIBILITY STUDIES
QUANTITATIVE CHEMICAL ANALYSIS