One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Chaplin, Vernon H.; Bellan, Paul M.

doi:10.1063/1.4938490

Title: One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Journal Article · Mon Dec 28 00:00:00 EST 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4938490· OSTI ID:1236697

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California Inst. of Technology (CalTech), Pasadena, CA (United States)

A time-dependent two-fluid model has been developed to understand axial variations in the plasma parameters in a very high density (peak n_e~ > 5x10¹⁹ m^–3) argon inductively coupled discharge in a long 1.1 cm radius tube. The model equations are written in 1D, with radial losses to the tube walls accounted for by the inclusion of effective particle and energy sink terms. The ambipolar diffusion equation and electron energy equation are solved to find the electron density n_e(z,t) and temperature T_e(z,t), and the populations of the neutral argon 4s metastable, 4s resonant, and 4p excited state manifolds are calculated in order to determine the stepwise ionization rate and calculate radiative energy losses. The model has been validated through comparisons with Langmuir probe ion saturation current measurements; close agreement between the simulated and measured axial plasma density profiles and the initial density rise rate at each location was obtained at p_Ar = 30-60 mTorr. Lastly, we present detailed results from calculations at 60 mTorr, including the time-dependent electron temperature, excited state populations, and energy budget within and downstream of the radiofrequency (RF) antenna.

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Research Organization:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0010471; FG02-04ER54755

OSTI ID:: 1236697

Alternate ID(s):: OSTI ID: 1234030

Journal Information:: Journal of Applied Physics, Vol. 118, Issue 24; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 4 works

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Metastables as a probe for low-temperature plasma characteristics in argon Makabe, Toshiaki Journal of Physics D: Applied Physics, Vol. 52, Issue 21 https://doi.org/10.1088/1361-6463/ab0531	journal	March 2019

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Title: One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

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