Fully 3D-Integrated Pixel Detectors for X-Rays
- Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
The vertically integrated photon imaging chip (VIPIC1) pixel detector is a stack consisting of a 500-μm-thick silicon sensor, a two-tier 34-μm-thick integrated circuit, and a host printed circuit board (PCB). The integrated circuit tiers were bonded using the direct bonding technology with copper, and each tier features 1-μm-diameter through-silicon vias that were used for connections to the sensor on one side, and to the host PCB on the other side. The 80-μm-pixel-pitch sensor was the direct bonding technology with nickel bonded to the integrated circuit. The stack was mounted on the board using Sn–Pb balls placed on a 320-μm pitch, yielding an entirely wire-bond-less structure. The analog front-end features a pulse response peaking at below 250 ns, and the power consumption per pixel is 25 μW. We successful completed the 3-D integration and have reported here. Additionally, all pixels in the matrix of 64 × 64 pixels were responding on well-bonded devices. Correct operation of the sparsified readout, allowing a single 153-ns bunch timing resolution, was confirmed in the tests on a synchrotron beam of 10-keV X-rays. An equivalent noise charge of 36.2 e- rms and a conversion gain of 69.5 μV/e- with 2.6 e- rms and 2.7 μV/e- rms pixel-to-pixel variations, respectively, were measured.
- Research Organization:
- Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), High Energy Physics (HEP)
- Grant/Contract Number:
- AC02-07CH11359
- OSTI ID:
- 1230025
- Report Number(s):
- FERMILAB-PUB-15-040-PPD
- Journal Information:
- IEEE Transactions on Electron Devices, Vol. 63, Issue 1; ISSN 0018-9383
- Publisher:
- IEEECopyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
A review of advances in pixel detectors for experiments with high rate and radiation
|
journal | May 2018 |
Particle and nuclear physics instrumentation and its broad connections
|
journal | December 2016 |
| A review of advances in pixel detectors for experiments with high rate and radiation | text | January 2017 |
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