Power spectrum analysis for defect screening in integrated circuit devices
Patent
·
OSTI ID:1226447
A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- SSO
- Patent Number(s):
- 9,188,622
- Application Number:
- 13/309,281
- OSTI ID:
- 1226447
- Country of Publication:
- United States
- Language:
- English
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