Methods of fabrication of graphene nanoribbons

Zhang, Yuegang

Title: Methods of fabrication of graphene nanoribbons

Patent · Tue Jun 23 00:00:00 EDT 2015

OSTI ID:1185301

Zhang, Yuegang

Methods of fabricating graphene nanoribbons include depositing a catalyst layer on a substrate. A masking layer is deposited on the catalyst layer. The masking layer and the catalyst layer are etched to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, with sidewalls of the catalyst layer being exposed. A graphene layer is formed on a sidewall of the catalyst layer with a carbon-containing gas.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: 9,061,912

Application Number:: 13/910,327

OSTI ID:: 1185301

Resource Relation:: Patent File Date: 2013 Jun 05

Country of Publication:: United States

Language:: English

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Methods of fabrication of graphene nanoribbons Zhang, Yuegang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9061912 US Patent Document 9,061,912	patent	June 2015

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