Extended surface parallel coating inspection method
Patent
·
OSTI ID:1175677
Techniques for rapidly characterizing reflective surfaces and especially multi-layer EUV reflective surfaces of optical components involve illuminating the entire reflective surface instantaneously and detecting the image far field. The technique provides a mapping of points on the reflective surface to corresponding points on a detector, e.g., CCD. This obviates the need to scan a probe over the entire surface of the optical component. The reflective surface can be flat, convex, or concave.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- 7,016,030
- Application Number:
- 10/689,171
- OSTI ID:
- 1175677
- Country of Publication:
- United States
- Language:
- English
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