Non- contacting capacitive diagnostic device
Patent
·
OSTI ID:1175424
A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-99GO10337
- Assignee:
- Energy Conversion Devices, Inc. (Rochester Hills, MI)
- Patent Number(s):
- 6,917,209
- Application Number:
- 09/953,477
- OSTI ID:
- 1175424
- Country of Publication:
- United States
- Language:
- English
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