Method to fabricate silicon chromatographic column comprising fluid ports

Manginell, Ronald P.; Frye-Mason, Gregory C.; Heller, Edwin J.; Adkins, Douglas R.

Title: Method to fabricate silicon chromatographic column comprising fluid ports

Full Record
Other Related Research

Abstract

A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.

Inventors:: Manginell, Ronald P.; Frye-Mason, Gregory C.; Heller, Edwin J.; Adkins, Douglas R.

Publication Date:: Tue Mar 02 00:00:00 EST 2004

Research Org.:: Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1174746

Patent Number(s):: 6,699,392

Application Number:: 10/167,238

Assignee:: Sandia Corporation (Albuquerque, NM)

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats


                    Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports.  United States: N. p., 2004. 
        Web.

Copy to clipboard


                    Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., & Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports.  United States.

Copy to clipboard


                    Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. 2004.  
        "Method to fabricate silicon chromatographic column comprising fluid ports".  United States.  https://www.osti.gov/servlets/purl/1174746.

Copy to clipboard


                    
@article{osti_1174746,

  title        = {Method to fabricate silicon chromatographic column comprising fluid ports},

  author       = {Manginell, Ronald P. and Frye-Mason, Gregory C. and Heller, Edwin J. and Adkins, Douglas R.},

  abstractNote = {A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/1174746},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Mar 02 00:00:00 EST 2004},

  month        = {Tue Mar 02 00:00:00 EST 2004}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Similar records in OSTI.GOV collections:

Non-planar microfabricated gas chromatography column

Patent Lewis, Patrick; Wheeler, David

A non-planar microfabricated gas chromatography column comprises a planar substrate having a plurality of through holes, a top lid and a bottom lid bonded to opposite surfaces of the planar substrate, and inlet and outlet ports for injection of a sample gas and elution of separated analytes. A plurality of such planar substrates can be aligned and stacked to provide a longer column length having a small footprint. Furthermore, two or more separate channels can enable multi-channel or multi-dimensional gas chromatography. The through holes preferably have a circular cross section and can be coated with a stationary phase material ormore »« less
Full Text Available
Microfabricated silicon gas chromatographic micro-channels: fabrication and performance

Conference Matzke, C; Kottenstette, R; Casalnuovo, S; ...

Using both wet and plasma etching, we have fabricated micro-channels in silicon substrates suitable for use as gas chromatography (GC) columns. Micro-channel dimensions range from 10 to 80 {micro}m wide, 200 to 400 {micro}m deep, and 10 cm to 100 cm long. Micro-channels 100 cm long take up as little as 1 cm{sup 2} on the substrate when fabricated with a high aspect ratio silicon etch (HARSE) process. Channels are sealed by anodically bonding Pyrex lids to the Si substrates. We have studied micro-channel flow characteristics to establish model parameters for system optimization. We have also coated these micro-channels withmore »« less
Full Text Available
Low Cost (CAPEX and variable): Tool design for cell and module fabrication with thin, free-standing silicon wafers

Technical Report Liu, Zhe; Bonner, Sara; Buonassisi, Tonio; ...

This project aimed to develop technologies that can potentially enable free-standing thin (<80 μm) wafer in today’s manufacturing lines with high production yield, and thereby reduce capex barriers of silicon photovoltaics cells and modules. One of the major benefits is that thin wafer dramatically reduces the amount of polysilicon required. As a result, it can lead to reduction in the capital expenditures associated with polysilicon refining and wafer fabrication, which together are more than half of the total capital expenditure to manufacture Si PV module. We focused our efforts on developing the tools needed to enable high yield fabrication ofmore »« less
https://doi.org/10.2172/1618395

Full Text Available
Micro-miniature gas chromatograph column disposed in silicon wafers

Patent Yu, C

A micro-miniature gas chromatograph column is fabricated by forming matching halves of a circular cross-section spiral microcapillary in two silicon wafers and then bonding the two wafers together using visual or physical alignment methods. Heating wires are deposited on the outside surfaces of each wafer in a spiral or serpentine pattern large enough in area to cover the whole microcapillary area inside the joined wafers. The visual alignment method includes etching through an alignment window in one wafer and a precision-matching alignment target in the other wafer. The two wafers are then bonded together using the window and target. Themore »« less
Micro-miniature gas chromatograph column disposed in silicon wafers

Patent Yu, Conrad

A micro-miniature gas chromatograph column is fabricated by forming matching halves of a circular cross-section spiral microcapillary in two silicon wafers and then bonding the two wafers together using visual or physical alignment methods. Heating wires are deposited on the outside surfaces of each wafer in a spiral or serpentine pattern large enough in area to cover the whole microcapillary area inside the joined wafers. The visual alignment method includes etching through an alignment window in one wafer and a precision-matching alignment target in the other wafer. The two wafers are then bonded together using the window and target. Themore »« less
Full Text Available

Similar Records