Light modulator with specific electrode configurations
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patent
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May 2000 |
Micromachined element and method of fabrication thereof
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patent
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June 2001 |
Electrostatically actuated electromagnetic radiation shutter
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patent
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May 2002 |
Electrostatic actuator, for causing a transverse movement of a yarn in a textile machine, and a textile machine including this actuator
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patent
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April 2005 |
Method of making photolithographically-patterned out-of-plane coil structures
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patent
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February 2006 |
Method for producing a microcoil
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patent
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May 2010 |
Microelectromechanical tunable inductor
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patent
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May 2010 |
Double-tuned circuit
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patent
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January 2011 |
Light screening apparatus including roll-up actuators
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patent
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November 2013 |
Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation
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journal
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January 2011 |
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
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journal
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January 2006 |
Self-organized 1.55 µm InAs/InP quantum dot tube nanoscale coherent light sources
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conference
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January 2011 |
Self-Assembled Ultra-Compact Energy Storage Elements Based on Hybrid Nanomembranes
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journal
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July 2010 |
Electroless deposition of novel Ag–W thin films
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journal
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November 2003 |
A novel low-loss Terahertz waveguide: Polymer tube
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journal
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January 2010 |
Controlled Assembly and Dispersion of Strain-Induced InGaAs/GaAs Nanotubes
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journal
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July 2008 |
InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays
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April 2008 |
Geometry Effect on the Strain-Induced Self-Rolling of Semiconductor Membranes
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October 2010 |
Directional scrolling of SiGe/Si/Cr nanoribbon on Si(111) surfaces controlled by two-fold rotational symmetry underetching
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journal
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January 2013 |
Strain-driven self-rolling mechanism for anomalous coiling of multilayer nanohelices
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journal
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December 2009 |
Stresses and deformation processes in thin films on substrates
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journal
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January 1988 |
Aligned arrays of single walled carbon nanotubes for transparent electronics
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conference
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June 2013 |
Terahertz attenuation and dispersion characteristics of coplanar transmission lines
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journal
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June 1991 |
Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils
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journal
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February 2001 |
Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes
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journal
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April 2004 |
Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties
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journal
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January 2008 |
Fabrication and applications of large arrays of multifunctional rolled-up SiO/SiO 2 microtubes
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journal
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January 2012 |
Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium
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journal
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April 1997 |
Optical properties of rolled-up tubular microcavities from shaped nanomembranes
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journal
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April 2009 |
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
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journal
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December 2005 |
Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes
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journal
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April 2012 |
Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells
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journal
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January 2009 |
Mechano-electronic Superlattices in Silicon Nanoribbons
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journal
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February 2009 |
Novel Highly Conductive Silver-Tungsten Thin Films Electroless Deposited from Benzoate Solution for Microelectronic Applications
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journal
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January 2003 |
Photonic-crystal slab for terahertz-wave integrated circuits
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conference
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September 2012 |
A 32nm SoC platform technology with 2nd generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications
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conference
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December 2009 |
On-chip spiral inductors suspended over deep copper-lined cavities
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journal
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January 2000 |
Coherent emission from ultrathin-walled spiral InGaAs/GaAs quantum dot microtubes
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journal
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January 2009 |
Influences of process parameters of low frequency PECVD technology on intrinsic stress of silicon nitride thin film
- Li, Weizhi; Kang, Zhe; Ye, Yun
-
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, SPIE Proceedings
https://doi.org/10.1117/12.867778
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conference
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October 2010 |
Self-rolled-up microtube ring resonators: a review of geometrical and resonant properties
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journal
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January 2011 |
Strain induced semiconductor nanotubes from formation process to device applications
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journal
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September 2008 |
Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer
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journal
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January 2009 |
Toroidal hollow-core microcavities produced by self-rolling of strained polymer bilayer films
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journal
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February 2008 |
Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure
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journal
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November 2006 |
Modeling of silicon nitride deposition by RF plasma-enhanced chemical vapor deposition
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journal
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January 1994 |
Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers
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journal
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November 2008 |
1.3 – 1.55 µm self-organized InAs quantum dot tube nanoscale lasers on silicon
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conference
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October 2011 |
Reducing Transmission Losses in Hollow THz Waveguides
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journal
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September 2011 |
Dielectric-lined cylindrical metallic THz waveguides: mode structure and dispersion
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journal
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January 2010 |
Single-mask microfabrication of three-dimensional objects from strained bimorphs
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journal
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August 2007 |
Si IC-compatible inductors and LC passive filters
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journal
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January 1990 |
Advances in Terahertz Waveguides and Sources
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journal
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April 2011 |
Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer
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journal
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August 2012 |
The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology
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journal
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January 1998 |
Residual stress improvement of platinum thin film in Au/Pt/Ti/p-GaAs ohmic contact by RF sputtering power
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journal
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November 2012 |
Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays
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journal
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February 2000 |
Rolled-up nanotechnology for the fabrication of three-dimensional fishnet-type GaAs-metal metamaterials with negative refractive index at near-infrared frequencies
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journal
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April 2012 |
Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled-Up Nanotechnology
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journal
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September 2010 |
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
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journal
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January 1990 |
Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors
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journal
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March 2009 |
Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications
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journal
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January 2000 |
Generation and registration of disturbances in a gas flow. 2. Experiments with arrays of tubular microheaters and microsensors
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journal
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May 2009 |
Mechanism of SiNxHy deposition from N2–SiH4 plasma
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journal
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May 1990 |
Lab-in-a-Tube: Detection of Individual Mouse Cells for Analysis in Flexible Split-Wall Microtube Resonator Sensors
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journal
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October 2011 |
From rolled-up Si microtubes to SiOx/Si optical ring resonators
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journal
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May 2007 |
Miniature 3-D inductors in standard CMOS process
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journal
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April 2002 |
Dual cylindrical metallic grating-cladding polymer hollow waveguide for terahertz transmission with low loss
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journal
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September 2010 |
Controlled Transfer of Single Rolled-Up InGaAs–GaAs Quantum-Dot Microtube Ring Resonators Using Optical Fiber Abrupt Tapers
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journal
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March 2010 |
Single rolled-up InGaAs/GaAs quantum dot microtubes integrated with silicon-on-insulator waveguides
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journal
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January 2011 |
Analysis of Bi-Metal Thermostats
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journal
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January 1925 |
Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films
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journal
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June 2007 |
High-Q Micromachined Inductors for 10-to-30-GHz RFIC Applications on Low Resistivity Si-Substrate
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conference
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September 2006 |
Formulas for the Skin Effect
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journal
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September 1942 |
Determination of coupling capacitance of underpasses, air bridges and crossings in MICs and MMICs
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journal
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January 1987 |
Chemical control of physical properties in silicon nitride films
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journal
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October 2012 |
A physical model for planar spiral inductors on silicon
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conference
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January 1996 |
Physical modeling of spiral inductors on silicon
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journal
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March 2000 |
Semiconductor Nanomembrane Tubes: Three-Dimensional Confinement for Controlled Neurite Outgrowth
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journal
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March 2011 |
Mechanism for Nanotube Formation from Self-Bending Nanofilms Driven by Atomic-Scale Surface-Stress Imbalance
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journal
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April 2007 |
Stacked inductors and transformers in CMOS technology
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journal
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April 2001 |