Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

Journal Article · Sun Dec 07 00:00:00 EST 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4904713· OSTI ID:1166998

Anders, Andre

The fundamental question of how energy is supplied to a magnetron discharge is commonly answered by the Penning-Thornton paradigm invoking secondary electrons. Huo et al. (Plasma Sources Sci. Technol. 22, 045005, (2013)) used a global discharge model to show that electron heating in the electric field of the magnetic presheath is dominant. In this contribution, this concept is applied locally taking into account the electric potential structure of ionization zones. Images of ionization zones can and should be interpreted as diagrams of the localization of electric potential and related electron energy, where certain collisions promote or dampen their formation.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 1166998
• Report Number(s): LBNL-6875E
• Journal Information: Applied Physics Letters, Vol. 105
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Plasma
magnetron sputtering
electron heating