EUV scatterometry-based measurement method for the determination of phase roughness

Chao, Rikon; Gullikson, Eric; Goldstein, Michael; Goodwin, Frank; Teki, Ranganath; Neureuther, Andy; Naulleau, Patrick

doi:10.1117/12.2027695

Title: EUV scatterometry-based measurement method for the determination of phase roughness

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Authors:: Chao, Rikon; Gullikson, Eric; Goldstein, Michael; Goodwin, Frank; Teki, Ranganath; Neureuther, Andy; Naulleau, Patrick

Publication Date:: Mon Sep 02 00:00:00 EDT 2013

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC)

OSTI Identifier:: 1164381

Report Number(s):: LBNL-6516E

DOE Contract Number:: DE-AC02-05CH11231

Resource Type:: Journal Article

Journal Name:: Proc. SPIE

Additional Journal Information:: Journal Volume: 8880; Related Information: Journal Publication Date: Sept. 2013

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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                    Chao, Rikon, Gullikson, Eric, Goldstein, Michael, Goodwin, Frank, Teki, Ranganath, Neureuther, Andy, and Naulleau, Patrick. EUV scatterometry-based measurement method for the determination of phase roughness.  United States: N. p., 2013. 
        Web.  doi:10.1117/12.2027695.

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                    Chao, Rikon, Gullikson, Eric, Goldstein, Michael, Goodwin, Frank, Teki, Ranganath, Neureuther, Andy, & Naulleau, Patrick. EUV scatterometry-based measurement method for the determination of phase roughness.  United States.  https://doi.org/10.1117/12.2027695

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                    Chao, Rikon, Gullikson, Eric, Goldstein, Michael, Goodwin, Frank, Teki, Ranganath, Neureuther, Andy, and Naulleau, Patrick. 2013.  
        "EUV scatterometry-based measurement method for the determination of phase roughness".  United States.  https://doi.org/10.1117/12.2027695.  https://www.osti.gov/servlets/purl/1164381.

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@article{osti_1164381,

  title        = {EUV scatterometry-based measurement method for the determination of phase roughness},

  author       = {Chao, Rikon and Gullikson, Eric and Goldstein, Michael and Goodwin, Frank and Teki, Ranganath and Neureuther, Andy and Naulleau, Patrick},

  abstractNote = {},

  doi          = {10.1117/12.2027695},

  url          = {https://www.osti.gov/biblio/1164381},
  journal      = {Proc. SPIE},
number       = ,

  volume       = 8880,

  place        = {United States},

  year         = {Mon Sep 02 00:00:00 EDT 2013},

  month        = {Mon Sep 02 00:00:00 EDT 2013}

}

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