Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

Resnick, Paul J.; Langlois, Eric

Title: Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

Patent · Tue Aug 26 00:00:00 EDT 2014

OSTI ID:1151787

Resnick, Paul J.; Langlois, Eric

Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 8,814,622

Application Number:: 13/298,448

OSTI ID:: 1151787

Country of Publication:: United States

Language:: English

References (12)

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Cold cathode field emission device with integral emitter ballasting Kane, Robert C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5142184 US Patent Document 5,142,184	patent	August 1992
Self-aligned gated electron field emitter Bagley, Brian G.; Marcus, Robert B.; Ravi, Tirunelveli S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5266530 US Patent Document 5,266,530	patent	November 1993
Field emission display devices, and field emission electron beam source and isolation structure components therefor Jones, Gary W.; Zimmerman, Steven M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5534743 US Patent Document 5,534,743	patent	July 1996
Field emission cathode with resistive gate areas and electron gun using same Imura, Hironori https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5717279 US Patent Document 5,717,279	patent	February 1998
Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region Macaulay, John M.; Searson, Peter C.; Duboc, Jr., Robert M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6204596 US Patent Document 6,204,596	patent	March 2001
Manufacture of field emission device Hattori, Atsuo; Miyazawa, Kenichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6329214 US Patent Document 6,329,214	patent	December 2001
Process for fabricating a microelectromechanical structure Sniegowski, Jeffry J.; Krygowski, Thomas W.; Mani, Seethambal S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6808952 US Patent Document 6,808,952	patent	October 2004
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Integrated field emission array for ion desorption Resnick, Paul J.; Hertz, Kristin L.; Holland, Christopher E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8536564 US Patent Document 8,536,564	patent	September 2013
Radiation shielding for field emitters Williams, Terry N.; Rolfson, J. Brett https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030057861 US Patent Application 10/263490; 20030057861	patent-application	March 2003
An integrated field emission array for ion desorption Resnick, P. J.; Holland, C. E.; Schwoebel, P. R. Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265 https://doi.org/10.1016/j.mee.2009.11.036	journal	May 2010

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