Metrology of 3D nanostructures.
Abstract
We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); University of Colorado,, Boulder, CO
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1144015
- Report Number(s):
- SAND2012-8966
456463
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Technical Report
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Barsic, Anthony, Piestun, Rafael, and Boye, Robert R. Metrology of 3D nanostructures.. United States: N. p., 2012.
Web. doi:10.2172/1144015.
Barsic, Anthony, Piestun, Rafael, & Boye, Robert R. Metrology of 3D nanostructures.. United States. https://doi.org/10.2172/1144015
Barsic, Anthony, Piestun, Rafael, and Boye, Robert R. 2012.
"Metrology of 3D nanostructures.". United States. https://doi.org/10.2172/1144015. https://www.osti.gov/servlets/purl/1144015.
@article{osti_1144015,
title = {Metrology of 3D nanostructures.},
author = {Barsic, Anthony and Piestun, Rafael and Boye, Robert R.},
abstractNote = {We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.},
doi = {10.2172/1144015},
url = {https://www.osti.gov/biblio/1144015},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Oct 01 00:00:00 EDT 2012},
month = {Mon Oct 01 00:00:00 EDT 2012}
}
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