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Title: Metrology of 3D nanostructures.

Abstract

We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.

Authors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); University of Colorado,, Boulder, CO
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1144015
Report Number(s):
SAND2012-8966
456463
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English

Citation Formats

Barsic, Anthony, Piestun, Rafael, and Boye, Robert R. Metrology of 3D nanostructures.. United States: N. p., 2012. Web. doi:10.2172/1144015.
Barsic, Anthony, Piestun, Rafael, & Boye, Robert R. Metrology of 3D nanostructures.. United States. https://doi.org/10.2172/1144015
Barsic, Anthony, Piestun, Rafael, and Boye, Robert R. 2012. "Metrology of 3D nanostructures.". United States. https://doi.org/10.2172/1144015. https://www.osti.gov/servlets/purl/1144015.
@article{osti_1144015,
title = {Metrology of 3D nanostructures.},
author = {Barsic, Anthony and Piestun, Rafael and Boye, Robert R.},
abstractNote = {We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.},
doi = {10.2172/1144015},
url = {https://www.osti.gov/biblio/1144015}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Oct 01 00:00:00 EDT 2012},
month = {Mon Oct 01 00:00:00 EDT 2012}
}