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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ;
Publication Date:
Research Org.:
University of Illinois, Urbana, IL (USA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1134327
Patent Number(s):
8,754,396
Application Number:
13/441,618
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Apr 06
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States: N. p., 2014. Web.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, & Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. 2014. "Stretchable form of single crystal silicon for high performance electronics on rubber substrates". United States. https://www.osti.gov/servlets/purl/1134327.
@article{osti_1134327,
title = {Stretchable form of single crystal silicon for high performance electronics on rubber substrates},
author = {Rogers, John A. and Khang, Dahl-Young and Sun, Yugang and Menard, Etienne},
abstractNote = {The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
url = {https://www.osti.gov/biblio/1134327}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 17 00:00:00 EDT 2014},
month = {Tue Jun 17 00:00:00 EDT 2014}
}

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Patterning organic–inorganic thin-film transistors using microcontact printed templates
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Analog and digital circuits using organic thin-film transistors on polyester substrates
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High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
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Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process
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Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
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Synthesis and Optical Properties of CdS Nanoribbons
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Lateral polysilicon p+–p–n+ and p+–n–n+ diodes
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Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems
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The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing
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Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors
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Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
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Finer features for functional microdevices
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Vertical Etching of Silicon at very High Aspect Ratios
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High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
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A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
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Invention of the integrated circuit
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Field emission from carbon nanotubes for displays
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Nanolithography based on patterned metal transfer and its application to organic electronic devices
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Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
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Optimized Structural Designs for Stretchable Silicon Integrated Circuits
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Stretchable and Foldable Silicon Integrated Circuits
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Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations
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Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
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Organic TFT Array on a Paper Substrate
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Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
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Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper
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Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
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High-mobility polymer gate dielectric pentacene thin film transistors
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Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
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Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
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Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers
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A hemispherical electronic eye camera based on compressible silicon optoelectronics
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Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
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Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
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Radio frequency analog electronics based on carbon nanotube transistors
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Control of Si Nanowire Growth by Oxygen
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High efficiency GaAs thin film solar cells by peeled film technology
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Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
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Nanotube Molecular Wires as Chemical Sensors
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Structures of indium oxide nanobelts
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Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
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A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques
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Mesoscale organization of metal nanocrystals
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Patterning Self-Assembled Monolayers: Applications in Materials Science
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Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
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Effect of mismatch strain on band gap in III‐V semiconductors
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Crystallographic alignment of high-density gallium nitride nanowire arrays
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Stretchable gold conductors on elastomeric substrates
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Stretchable Interconnects for Elastic Electronic Surfaces
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Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits
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An Elastically Stretchable TFT Circuit
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Stiff subcircuit islands of diamondlike carbon for stretchable electronics
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Mechanisms of reversible stretchability of thin metal films on elastomeric substrates
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Diamond growth in a direct-current low-pressure supersonic plasmajet
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Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
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Some properties of spherical and rod-shaped semiconductor and metal nanocrystals
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SEMICONDUCTOR NANOWIRES AND NANOTUBES
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Nanoribbon Waveguides for Subwavelength Photonics Integration
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III–V micromachined devices for microsystems
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Degradation mechanism of diethylene glycol units in a terephthalate polymer
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Thin film transistors for displays on plastic substrates
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High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
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Organic light-emitting diodes formed by soft contact lamination
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A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
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The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
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Application of carbon nanotubes to field emission displays
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Weave Patterned Organic Transistors on Fiber for E-Textiles
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High-Resolution Contact Printing with Dendrimers
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Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
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Electrospinning of Nanofibers: Reinventing the Wheel?
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Compliant thin film patterns of stiff materials as platforms for stretchable electronics
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ZnO nanobelts grown on Si substrate
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Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
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The Incredible Shrinking Circuit
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Nanoscale Science and Technology: Building a Big Future from Small Things
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Flexible membrane pressure sensor
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Creating micro- and nanostructures on tubular and spherical surfaces
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High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities
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Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers
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Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors
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Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
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High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
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Interfacial Chemistries for Nanoscale Transfer Printing
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
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Electrical Contacts to Molecular Layers by Nanotransfer Printing
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Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
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Electronic materials: Buckling down for flexible electronics
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One-dimensional hole gas in germanium/silicon nanowire heterostructures
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Nanowire Transistor Performance Limits and Applications
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An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
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Single-Crystal CdSe Nanosaws
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Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
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Mechanically Strained Strained-Si NMOSFETs
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Diamond-structured photonic crystals
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Fully elastic interconnects on nanopatterned elastomeric substrates
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Controlled growth of tetrapod-branched inorganic nanocrystals
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Architectonic Quantum Dot Solids
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Conducting elastomer surface texturing: a path to electrode spotting
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Nanowire Arrays Defined by Nanoimprint Lithography
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Template Synthesis of Electronically Conductive Polymer Nanostructures
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Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
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Fabrication of Ordered Diamond/metal Nanocomposite Structures
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An improved GaAs device model for the simulation of analog integrated circuit
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High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
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High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
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Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
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Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
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Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
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Transfer printing by kinetic control of adhesion to an elastomeric stamp
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Stress focusing for controlled fracture in microelectromechanical systems
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Ultrahigh-Density Nanowire Lattices and Circuits
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A printable form of silicon for high performance thin film transistors on plastic substrates
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High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics
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Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
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Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
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Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
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Printing meets lithography: Soft approaches to high-resolution patterning
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Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
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Colloidal nanocrystal heterostructures with linear and branched topology
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Plastic Electronics and Their Packaging Technologies
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Emerging Methods for Micro- and Nanofabrication
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Electrically Induced Optical Emission from a Carbon Nanotube FET
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AlGaN/GaN HEMTs-an overview of device operation and applications
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High-mobility ultrathin semiconducting films prepared by spin coating
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Ink-Jet Printing of Binders for Ceramic Components
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Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
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A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
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Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics
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A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics
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High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
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Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
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On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
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Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
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Nanotubes of the disulfides of groups 4 and 5 metals
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Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays
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Amorphous silicon technology for large area digital X-ray and optical imaging
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Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
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Luminescence Photophysics in Semiconductor Nanocrystals
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New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
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Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
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Electric Field Effect in Atomically Thin Carbon Films
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Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
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Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
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Improved Pattern Transfer in Soft Lithography Using Composite Stamps
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Ordering of microwrinkle patterns by compressive strain
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Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns
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High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
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Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
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High Frequency Properties of Electro-Textiles for Wearable Antenna Applications
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Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
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Nanobelts of Semiconducting Oxides
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Sharp exciton emission from single InAs quantum dots in GaAs nanowires
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Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices
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Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
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Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes
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Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
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GaN: Processing, defects, and devices
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Shape control of CdSe nanocrystals
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Protective diamond-like carbon coatings for future optical storage disks
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Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
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Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
journal, January 2002


From Micro- to Nanofabrication with Soft Materials
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Laser-lithography on non-planar surfaces
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Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
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High-power laser diodes based on InGaAsP alloys
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Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables
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Macroelectronics: Perspectives on Technology and Applications
journal, July 2005


Macroelectronics
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Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
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All-Inorganic Field Effect Transistors Fabricated by Printing
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Looking at Rubber Adhesion
journal, March 1979


Elastically relaxed free-standing strained-silicon nanomembranes
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GaAs Readied for High-Speed Microcircuits
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Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits
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Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
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Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
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Quantifying distortions in soft lithography
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Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
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Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
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Printed plastic electronics and paperlike displays
journal, August 2002


Farewell to Flatland
journal, July 2010


Rubber Stamping for Plastic Electronics and Fiber Optics
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Toward Paperlike Displays
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High Performance Electrolyte Gated Carbon Nanotube Transistors
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Universal description of channel conductivity for nanotube and nanowire transistors
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Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
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Optimal strategy for controlling linewidth on spherical focal surface arrays
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Semiconductor nanowires for novel one-dimensional devices
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Morphology of nanostructured materials
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Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
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Thin-film GaAs epitaxial lift-off solar cells for space applications
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Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off
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Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
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Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
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Nanotechnology: Thin solid films roll up into nanotubes
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Aluminum metallization—Advantages and limitations for integrated circuit applications
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Mechanical properties of silicones for MEMS
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Ambipolar Pentacene Field-Effect Transistors and Inverters
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The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
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On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors
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Bending experiment on pentacene field-effect transistors on plastic films
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A Rubberlike Stretchable Active Matrix Using Elastic Conductors
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Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon
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High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions
journal, May 2000


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Electronic Textiles Charge Ahead
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From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
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Holographic photonic crystals with diamond symmetry
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Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
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Formation and characterization of silicon films on flexible polymer substrates
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Synthesis of Large Areas of Highly Oriented, Very Long Silicon Nanowires
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Free-standing Single Crystal Silicon Nanoribbons
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Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
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Axisymmetric adhesion tests of soft materials
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Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane)
journal, March 2007


An analytical back-gate bias effect model for ultrathin SOI CMOS devices
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Inkjet Printing of Functional Materials
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High-Resolution Inkjet Printing of All-Polymer Transistor Circuits
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Device Physics of Solution-Processed Organic Field-Effect Transistors
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Colloidal Inks for Directed Assembly of 3-D Periodic Structures
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Electric-field assisted assembly and alignment of metallic nanowires
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Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
journal, August 2005


Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners
journal, November 2005


A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications
journal, June 2004


Optics: Electronic eyeballs
journal, August 2008


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
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A buckling-based metrology for measuring the elastic moduli of polymeric thin films
journal, July 2004


Fabrication of solid-state nanopores with single-nanometre precision
journal, July 2003


CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices
journal, April 2005


Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond
journal, April 2005


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Advances in organic field-effect transistors
journal, November 2004


Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates
journal, August 2005


Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
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Inorganic Semiconductors for Flexible Electronics
journal, August 2007


Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics
journal, January 2007


Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates
journal, November 2006


Controlled buckling of semiconductor nanoribbons for stretchable electronics
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Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
journal, March 2004


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras
conference, September 2004


Over 30% efficient InGaP/GaAs tandem solar cells
journal, January 1997


PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors
journal, October 2005


Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate
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Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise
journal, April 2005


Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy
journal, September 2003


Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD
journal, September 2001


Polysilicon thin film transistors fabricated at 100°C on a flexible plastic substrate
conference, December 1998


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
journal, December 1995


Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
journal, December 2003


Etching of DLC films using a low intensity oxygen plasma jet
journal, April 2000


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


Porous silica via colloidal crystallization
journal, October 1997


Molecular control over Au/GaAs diodes
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On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001


Cheap and cheerful circuits
journal, September 2000


Silicon for thin-film transistors
journal, April 2003


Electronic skin: architecture and components
journal, November 2004


Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly
journal, August 2005


Direct synthesis and characterization of CdS nanobelts
journal, July 2006


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires
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Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
journal, September 2003


Growth and properties of nanocrystalline diamond films
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Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond
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Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications
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Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes
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Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate
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Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
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Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
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Inorganic Semiconductor Nanowires Rational Growth, Assembly, and Novel Properties
journal, March 2002


Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
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Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
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Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates
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Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
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Direct Observation of Vapor−Liquid−Solid Nanowire Growth
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Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication
journal, September 1996


Soft Lithography
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Soft Lithography
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Unconventional Methods for Fabricating and Patterning Nanostructures
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One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
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Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters
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Ge/Si nanowire heterostructures as high-performance field-effect transistors
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Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process
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Mesoporous silica with micrometer-scale designs
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Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
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Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
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RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology
journal, December 2007


The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


High-Field Electrical Transport in Single-Wall Carbon Nanotubes
journal, March 2000


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Colloidal nanocrystal synthesis and the organic–inorganic interface
journal, September 2005


Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000


Solution–Liquid–Solid Growth of Soluble GaAs Nanowires
journal, March 2003


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers
journal, July 2006


Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
journal, August 2004

  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903
  • https://doi.org/10.1021/ja047451u

Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps
journal, February 2003


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons
journal, October 2005


Oxide-Assisted Growth of Semiconducting Nanowires
journal, April 2003


Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition
journal, April 2004


Electronic transport in nanometre-scale silicon-on-insulator membranes
journal, February 2006


Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts
journal, July 2006


Improved field emission properties from metal-coated diamond films
journal, March 2007


Shape-and-solder-directed self-assembly to package semiconductor device segments
journal, October 2004


Sequential shape-and-solder-directed self-assembly of functional microsystems
journal, August 2004


An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
journal, May 2002


p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004


Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
journal, September 2005


Mechanism for stamp collapse in soft lithography
journal, December 2005


Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005


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Micro assembled LED displays and lighting elements
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Micro assembled LED displays and lighting elements
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