Atomic layer deposition of quaternary chalcogenides

Thimsen, Elijah J; Riha, Shannon C; Martinson, Alex B.F.; Elam, Jeffrey W; Pellin, Michael J

Title: Atomic layer deposition of quaternary chalcogenides

Patent · Tue Jun 03 00:00:00 EDT 2014

OSTI ID:1133663

Thimsen, Elijah J; Riha, Shannon C; Martinson, Alex B.F.; Elam, Jeffrey W; Pellin, Michael J

Methods and systems are provided for synthesis and deposition of chalcogenides (including Cu.sub.2ZnSnS.sub.4). Binary compounds, such as metal sulfides, can be deposited by alternating exposures of the substrate to a metal cation precursor and a chalcogen anion precursor with purge steps between.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-06CH11357

Assignee:: Uchicago Argonne, LLC (Chicago, IL)

Patent Number(s):: 8,741,386

Application Number:: 13/631,135

OSTI ID:: 1133663

Country of Publication:: United States

Language:: English

References (6)

Self -Organizing Nanostructured Solar Cells Bent, Stacey F.; Clemens, Bruce M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090314342 US Patent Application 12/4565208; 20090314342	patent-application	December 2009
Solar Cell Absorber Layer Formed From Equilibrium Precursors Woodruff, Jacob; Van Duren, Jeroen K. J.; Robinson, Matthew R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100248419 US Patent Application 12/706709; 20100248419	patent-application	September 2010
Atomic Layer Deposition of the Quaternary Chalcogenide Cu ₂ ZnSnS ₄ Thimsen, Elijah; Riha, Shannon C.; Baryshev, Sergey V. Chemistry of Materials, Vol. 24, Issue 16 https://doi.org/10.1021/cm3015463	journal	August 2012
Atmospheric Pressure Chemical Vapor Deposition of Tin Sulfides (SnS, Sn ₂ S ₃ , and SnS ₂ ) on Glass Price, Louise S.; Parkin, Ivan P.; Hardy, Amanda M. E. Chemistry of Materials, Vol. 11, Issue 7 https://doi.org/10.1021/cm990005z	journal	July 1999
Tin Monosulfide Thin Films Grown by Atomic Layer Deposition Using Tin 2,4-Pentanedionate and Hydrogen Sulfide Kim, Jay Yu; George, Steven M. The Journal of Physical Chemistry C, Vol. 114, Issue 41 https://doi.org/10.1021/jp9120244	journal	September 2010
Atomic Layer Deposition of Tin Monosulfide Thin Films Sinsermsuksakul, Prasert; Heo, Jaeyeong; Noh, Wontae Advanced Energy Materials, Vol. 1, Issue 6, p. 1116-1125 https://doi.org/10.1002/aenm.201100330	journal	September 2011

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