Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Univ. of Cambridge (United Kingdom). Dept. of Materials Science and Metallurgy
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
We report our effort to quantify atomic-scale chemical maps obtained by collecting energy-dispersive X-ray spectra (EDS) using scanning transmission electron microscopy (STEM) (STEM-EDS). With thin specimen conditions and localized EDS scattering potential, the X-ray counts from atomic columns can be properly counted by fitting Gaussian peaks at the atomic columns, and can then be used for site-by-site chemical quantification. The effects of specimen thickness and X-ray energy on the Gaussian peak width are investigated using SrTiO3 (STO) as a model specimen. The relationship between the peak width and spatial resolution of an EDS map is also studied. Furthermore, the method developed by this work is applied to study cation occupancy in a Sm-doped STO thin film and antiphase boundaries (APBs) present within the STO film. In conclusion, we find that Sm atoms occupy both Sr and Ti sites but preferably the Sr sites, and Sm atoms are relatively depleted at the APBs likely owing to the effect of strain.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- Grant/Contract Number:
- AC04-94AL85000; AC52-06NA25396
- OSTI ID:
- 1117575
- Alternate ID(s):
- OSTI ID: 1321754
- Report Number(s):
- SAND-2013-9538J; LA-UR-15-20912; 481152
- Journal Information:
- Microscopy and Microanalysis, Vol. 20, Issue 06; ISSN 1431-9276
- Publisher:
- Microscopy Society of America (MSA)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Web of Science
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