Thermoacoustic imaging using heavy ion beams
Ion beams have been used for surface modification, semiconductor device fabrication and for material analysis, which makes ion-material interactions of significant importance. Ion implantation will produce new compositions near the surface by ion mixing or directly by implanting desired ions. Ions exchange their energy to the host material as they travel into the material by several different processes. High energy ions ionize the host atoms before atomic collisions transfer the remaining momentum and stop the incident ion. As they penetrate the surface, the low energy ions ionize the host atoms, but also have a significantly large momentum transfer mechanism near the surface of the material. This leads to atoms, groups of atoms and electrons being ejected from the surface, which is the momentum transfer process of sputtering. This talk addresses the acoustic waves generated during ion implantation using modulated heavy ion beams. The mechanisms for elastic wave generation during ion implantation, in the regimes where sputtering is significant and where implantation is dominant and sputtering is negligible, has been studied. The role of momentum transfer and thermal energy production during ion implantation was compared to laser generated elastic waves in an opaque solid as a reference, since laser generated ultrasound has been extensively studied and is fairly well understood. The thermoelastic response dominated in both high and low ion energy regimes since, apparently, more energy is lost to thermal heat producing mechanisms than momentum transfer processes. The signal magnitude was found to vary almost linearly with incident energy as in the laser thermoelastic regime. The time delays for longitudinal and shear waves-were characteristic of those expected for a purely thermal heating source. The ion beams are intrinsically less sensitive to the albedo of the surface.
- Research Organization:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 110701
- Report Number(s):
- LA-SUB-95-172; ON: DE96000860; TRN: 95:007307
- Resource Relation:
- Other Information: PBD: [1995]
- Country of Publication:
- United States
- Language:
- English
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