Thermochemical nanolithography components, systems, and methods

Riedo, Elisa; Marder, Seth R.; de Heer, Walt A.; Szoskiewicz, Robert J.; Kodali, Vamsi K.; Jones, Simon C.; Okada, Takashi; Wang, Debin; Curtis, Jennifer E.; Henderson, Clifford L.; Hua, Yueming

Title: Thermochemical nanolithography components, systems, and methods

Patent · Tue Jun 18 00:00:00 EDT 2013

OSTI ID:1084067

Riedo, Elisa; Marder, Seth R.; de Heer, Walt A.; Szoskiewicz, Robert J.; Kodali, Vamsi K.; Jones, Simon C.; Okada, Takashi; Wang, Debin; Curtis, Jennifer E.; Henderson, Clifford L.; Hua, Yueming

Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

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Research Organization:: DOESC (USDOE Office of Science (SC) (United States))

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-06ER46293

Assignee:: Georgia Tech Research Corporation (Atlanta, GA)

Patent Number(s):: 8,468,611

Application Number:: 12/791,466

OSTI ID:: 1084067

Country of Publication:: United States

Language:: English

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Aromatic Amines: A Comparison of Electron-Donor Strengths Kwon, Ohyun; Barlow, Stephen; Odom, Susan A. The Journal of Physical Chemistry A, Vol. 109, Issue 41 https://doi.org/10.1021/jp054334s	journal	September 2005
Nanofabrication by scanning probe microscope lithography: A review Tseng, Ampere A.; Notargiacomo, Andrea; Chen, T. P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3 https://doi.org/10.1116/1.1926293	journal	January 2005
Thermomechanical Formation of Nanoscale Polymer Indents With a Heated Silicon Tip King, William P.; Goodson, Kenneth E. Journal of Heat Transfer, Vol. 129, Issue 11 https://doi.org/10.1115/1.2764088	journal	January 2007
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Direct Patterning of Modified Oligonucleotides on Metals and Insulators by Dip-Pen Nanolithography Demers, L. M. Science, Vol. 296, Issue 5574 https://doi.org/10.1126/science.1071480	journal	June 2002
An anionic organic mixed-valence system with a remarkably well-resolved vibrational structure in its intervalence band Risko, Chad; Barlow, Stephen; Coropceanu, Veaceslav Chemical Communications, Issue 2 https://doi.org/10.1039/b210429f	journal	December 2002
Fluorenyl-substituted silole molecules: geometric, electronic, optical, and device properties Zhan, Xiaowei; Haldi, Andreas; Risko, Chad Journal of Materials Chemistry, Vol. 18, Issue 26 https://doi.org/10.1039/b803470b	journal	January 2008
Preparation and characterization of chemical gradient surfaces and their application for the study of cellular interaction phenomena Ruardy, T. G.; Schakenraad, J. M.; van der Mei, H. C. Surface Science Reports, Vol. 29, Issue 1 https://doi.org/10.1016/S0167-5729(97)00008-3	journal	January 1997
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Polymer Pen Lithography Huo, F.; Zheng, Z.; Zheng, G. Science, Vol. 321, Issue 5896 https://doi.org/10.1126/science.1162193	journal	September 2008
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