Band excitation method applicable to scanning probe microscopy

Jesse, Stephen; Kalinin, Sergei V

Title: Band excitation method applicable to scanning probe microscopy

Patent · Tue May 28 00:00:00 EDT 2013

OSTI ID:1083943

Jesse, Stephen; Kalinin, Sergei V

Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation). An apparatus includes a band excitation signal generator; a probe coupled to the band excitation signal generator; a detector coupled to the probe; and a relevant dynamic parameter extractor component coupled to the detector, the relevant dynamic parameter extractor including a processor that performs a mathematical transform selected from the group consisting of an integral transform and a discrete transform.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-00OR22725

Assignee:: UT Battelle, LLC (Oak Ridge, TN)

Patent Number(s):: 8,448,502

Application Number:: 12/792,477

OSTI ID:: 1083943

Country of Publication:: United States

Language:: English

References (26)

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