Rapid thermal processing by stamping

Stradins, Pauls; Wang, Qi

Title: Rapid thermal processing by stamping

Patent · Tue Mar 05 00:00:00 EST 2013

OSTI ID:1083459

Stradins, Pauls; Wang, Qi

A rapid thermal processing device and methods are provided for thermal processing of samples such as semiconductor wafers. The device has components including a stamp (35) having a stamping surface and a heater or cooler (40) to bring it to a selected processing temperature, a sample holder (20) for holding a sample (10) in position for intimate contact with the stamping surface; and positioning components (25) for moving the stamping surface and the stamp (35) in and away from intimate, substantially non-pressured contact. Methods for using and making such devices are also provided. These devices and methods allow inexpensive, efficient, easily controllable thermal processing.

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Research Organization:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC36-99G010337

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Number(s):: 8,389,422

Application Number:: 12/675,117

OSTI ID:: 1083459

Country of Publication:: United States

Language:: English

References (10)

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Method for forming polycrystalline silicon from the crystallization of microcrystalline silicon Voutsas, Tolis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5827773 US Patent Document 5,827,773	patent	October 1998
Solid phase crystallization of thin films of Si prepared by plasma‐enhanced chemical vapor deposition Masaki, Y.; LeComber, P. G.; Fitzgerald, A. G. Journal of Applied Physics, Vol. 74, Issue 1 https://doi.org/10.1063/1.354144	journal	July 1993
Method for heating and cooling substrates Morad, Ratson; Shin, Ho Seon; Cheung, Robin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6658763 US Patent Document 6,658,763	patent	December 2003
Light management film with colorant receiving layer Bourdelais, Robert P.; Kaminsky, Cheryl J.; Arrington, Eric E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6818276 US Patent Document 6,818,276	patent	November 2004
Thermal stamping apparatus Izumihara, Hiroshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4242166 US Patent Document 4,242,166	patent	December 1980
Thermal stamping device Izumihara, Hiroshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4264394 US Patent Document 4,264,394	patent	April 1981
Pressure controlled heat source and method for using such for RTP Kellerman, Peter L.; Carlson, Frederick M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6735378 US Patent Document 6,735,378	patent	May 2004
Machine tool for stamping, nibbling and thermal cutting and the like Klingel, Hans https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4583719 US Patent Document 4,583,719	patent	April 1986

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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
42 ENGINEERING

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