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Title: Method and system for laser-based formation of micro-shapes in surfaces of optical elements

Patent ·
OSTI ID:1083453

A method of forming a surface feature extending into a sample includes providing a laser operable to emit an output beam and modulating the output beam to form a pulse train having a plurality of pulses. The method also includes a) directing the pulse train along an optical path intersecting an exposed portion of the sample at a position i and b) focusing a first portion of the plurality of pulses to impinge on the sample at the position i. Each of the plurality of pulses is characterized by a spot size at the sample. The method further includes c) ablating at least a portion of the sample at the position i to form a portion of the surface feature and d) incrementing counter i. The method includes e) repeating steps a) through d) to form the surface feature. The sample is free of a rim surrounding the surface feature.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Number(s):
8,389,889
Application Number:
12/818,094
OSTI ID:
1083453
Country of Publication:
United States
Language:
English

References (11)

Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO 2 laser conference May 2006
Method and apparatus for repair of defects in materials with short laser pulses patent April 2005
Methods for mitigating surface damage growth in NIF final optics conference March 2002
Localized CO 2 -laser treatment for mitigation of 351-nm damage growth in fused silica conference March 2002
Method and system for high-speed, precise micromachining an array of devices patent October 2005
Mitigation of laser damage growth in fused silica with a galvanometer scanned CO2 laser
  • Bass, Isaac L.; Guss, Gabriel M.; Hackel, Richard P.
  • Boulder Damage Symposium XXXVII: Annual Symposium on Optical Materials for High Power Lasers https://doi.org/10.1117/12.638828
conference December 2005
Method for producing damage resistant optics patent February 2003
CO2 laser and plasma microjet process for improving laser optics patent September 2003
Method and system for ultrafast photoelectron microscope patent December 2006
Laser machining of glass-ceramic materials patent September 1997
Method and device for machining holes or shapes of varying profile using an excimer laser patent December 2001

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